关键词: 在片测量, S参数测量系统, 散射参数, 校准, 裸芯片

Abstract: On-wafer S-parameter measurement system has been widely applied in bare chip measurement in the semiconductor industry, but the current situation of the ineffective traceability of domestic on-wafer S-parameter measurement system has influenced the R&D process of high-end bare chip products. To develop the calibration capacity of this measurement, this paper developed strip on-wafer calibration standard, on-wafer transmit calibration standard and on-wafer verification standard, built high accuracy on-wafer S-parameter transmit standard calibration system, traced on-wafer S-parameter to  geometric basis through HFSS simulation method, and then finally built the calibration capacity with on-wafer S-parameter transmit parameter , laid the technical foundation for completing the on-wafer S-parameter measurement system finally.|

Key words: On-wafer measurement, S-parameter measurement system, Scattering parameter, Calibration, Bare chip