宇航计测技术 ›› 2022, Vol. 42 ›› Issue (6): 13-21.doi: 10.12060/j.issn.1000-7202.2022.06.03

• 量值传递技术 • 上一篇    下一篇

宽禁带半导体器件脉冲电压测试及校准技术研究

饶张飞，秦凯亮，薛栋，金红霞   

  1. 西安微电子技术研究所，西安 710119
  • 出版日期:2022-12-25 发布日期:2023-02-07
  • 作者简介:饶张飞（1980-），男，研究员，本科，主要研究方向：从事集成电路计量测试技术研究。

Research on Pulse Voltage Testing and Calibration of Wide-bandgap Semiconductor Devices

RAO Zhang-fei,QIN Kai-liang,XUE Dong,JIN Hong-xia   

  1. Xi’an Microelectronic Technology Institute,Xi’an 71000,China
  • Online:2022-12-25 Published:2023-02-07

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摘要： 针对第三代宽禁带（WBG）半导体分立器件的脉冲测试及测试用脉冲电压信号的校准需求，在WBG半导体分立器件双脉冲测试（DPT）方法和原理研究的基础上，分析了目前国内外常用WBG半导体分立器件测试设备的技术现状，提出了3 kV/50 μs脉冲电压的精密校准难题。进一步对脉冲高压校准现状及校准方法进行研究，通过电阻式分压器机理分析、设计及仿真，研制出了耐压3 kV、上升时间140 ns、幅值线性度0.03%的精密分压器。采用自研制的脉冲分压器对半导体分立器件测试设备的脉冲电压进行校准，校准结果的不确定度为0.5%，满足脉冲高压校准需求。

关键词: 宽禁带半导体, 测试设备, 双脉冲测试, 脉冲电压校准

Abstract: In terms of the pulse test and calibration requirements of the third-generation wide-bandgap (WBG) semiconductor devices.Based on the research of double pulse test (DPT) method and principle of wide-bandgap semiconductor devices，The wide-bandgap semiconductor device test equipment technology status at domestic and foreign are analyzed.The precision calibration problem of 3 kV/50 μs pluse voltage are presented.The pulse high voltage calibration status and calibration method are researched.Through the mechanism analysis design and simulation of the resistive voltage divider，a precision voltage divider withstand voltage of 3 kV,rise time of 140 ns and amplitude linearity of 0.03% is developed.The self-developed pulse voltage divider is used to calibrate the pulse voltage of the semiconductor discrete device test equipment.The uncertainty of the calibration result is 0.5%，the needs of pulse high voltage calibration are satisfied.

Key words: Wide-bandgap semiconductor, Test equipment, Double pulse test, Pulse voltage calibration

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