宇航计测技术 ›› 2021, Vol. 41 ›› Issue (6): 68-75.doi: 10.12060/j.issn.1000-7202.2021.06.13

• 计量技术综述 • 上一篇    下一篇

微纳力值测量技术发展现状与分析

钟山, 高炳涛, 岑格, 王小三, 任大呈   

  1. 北京航天计量测试技术研究所,北京 100076
  • 出版日期:2021-12-24 发布日期:2022-02-16
  • 作者简介:钟山(1991-),男,工程师,主要研究方向:力学计量。

Development status and analysis of micro nano force measurement technology

ZHONG Shan, GAO Bing-tao, CEN Ge , WANG Xiao-san, REN Da-cheng   

  1. Beijing Aerospace Institute for Metrology and Measurement Technology, Beijing 100076, China
  • Online:2021-12-24 Published:2022-02-16

摘要: 介绍了近年来微纳力值测试技术的发展现状。微纳力值测量方法、测量及研究成果,并进行了不同测试方法的对比,指出了不同测试方法的特点和适用性。基于当前微纳测量领域发展趋势,结合行业发展需求,提出了微纳力值测试技术研究应注意的问题。

关键词: 微纳力值, 测量技术, 测量不确定度

Abstract: The development status of micronewton/nanonewton force measurement technology in recent years is introduced. The measurement methods, measurement and research results of micronewton/nanonewton force value are compared, and the characteristics and applicability of different test methods are pointed out. Based on the current development trend of micronewton/nanonewton force measurement field and combined with the development needs of the industry, the problems needing attention in the research of micro nano force measurement technology are put forward.

Key words: Micronewton/Nanonewton force, Measuring technology, Measuring uncertainty