宇航计测技术 ›› 2024, Vol. 44 ›› Issue (6): 75-82.doi: 10.12060/j.issn.1000-7202.2024.06.09

• 精密测试技术 • 上一篇    下一篇

基于银膜片的MEMS光纤F-P水听器

李涛1,邵志强1,2,徐冬1,李帅2,胡宇涵1,王洋洋1,刘彬2,*   

  1. 1.中国电子科技集团公司第四十九研究所,哈尔滨 150028；2.哈尔滨工程大学,哈尔滨 150001
  • 出版日期:2024-12-15 发布日期:2025-01-21
  • 作者简介:李涛（1980-），男，高级工程师，硕士，主要研究方向：MEMS传感器技术。
  • 基金资助:
    黑龙江省自然科学基金联合引导项目（LH2023F028）；教育部产学合作协同育人项目（231001195134702）

MEMS Fiber F-P Hydrophone Based on Silver Film

LI Tao1,SHAO Zhiqiang1,2,XU Dong1,LI Shuai2,HU Yuhan1,WANG Yangyang1,LIU Bin2,*   

  1. 1.China Electronics Technology Group Corporation 49th Research Institute,Harbin 150028,China;
    2.Harbin Engineering University,Harbin 150001,China
  • Online:2024-12-15 Published:2025-01-21

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摘要： 针对膜片式水听器灵敏度和抗净水压能力无法兼得的问题,提出了一种基于银膜片的MEMS（Micro-Electro-Mechanical System,微机电系统）光纤法布里-珀罗（F-P）水听器,并对其进行了制作和测试。使用基于牺牲层的膜片工艺制作银膜片作为声压敏感单元,利用空气作为F-P腔内的材料,提升了MEMS光纤F-P水听器的声压灵敏度。对所制备的MEMS光纤F-P水听器的性能进行了测试和分析。结果表明,该光纤F-P水听器在80~800 Hz范围内相位灵敏度在-157±3 dB re 1rad/μPa范围内,400 Hz处的动态范围为56.21 dB。该水听器具有结构简单、灵敏度高等优势。

关键词: 银膜片, 光纤, 水听器, 法布里-珀罗

Abstract: To ensure the diaphragm-based F-P hydrophone shares the sensitivity and resistance to net water pressure,a MEMS fiber F-P hydrophone is proposed,fabricated and tested.A silver membrane is fabricated using a sacrificial layer based membrane process as the sound pressure sensitive unit,and air is used as the material in the F-P cavity,thereby the sound pressure sensitivity of the fiber optic hydrophone is improved.The performance of MEMS fiber optic F-P hydrophone is tested and analyzed.The results show that the phase sensitivity of the fiber optic F-P hydrophone is -157±3 dB re 1rad/μPa in the range of 80～800 Hz,and the dynamic range at 400 Hz is 56.21 dB.This hydrophone has advantages such as simple structure and high sensitivity.

Key words: Silver Film, Fiber, Hydrophone, F-P

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