关键词: 摆式差动电容倾角传感器, 保角变换, 格林函数法, 边缘效应, 输出特性

Abstract: In order to study the output characteristics of a pendulum differential capacitive tilt sensor that takes into account the lateral edge effect of the capacitor plate,the conformal transformation and Green’s function are used to discuss the electric field of the capacitive tilt sensor,and the relationship between its capacitance and angular displacement is obtained.The output characteristics curve of the sensor is plotted using MATLAB,and a quantitative analysis is conducted on the factors that affect the output characteristics of the sensor.The simulation results show that when the width of the moving plate of the sensor is smaller than that of the stationary plate,increasing the width difference between the two plates,moderately increasing the spacing between the plates,and reducing the width of the straight gap of the plates can improve the linearity and sensitivity of the sensor,and its output characteristics.

Key words: Pendulum differential capacitive tilt sensor, Conformal mapping, Green’s function, Edge effect, Output characteristics