关键词: 摆式电容倾角传感器, 保角变换法, 格林函数法, 边缘效应, 特性优化, 数值模拟

Abstract: In order to study the output characteristics of the pendulous capacitive tilt sensor taking into account the transverse edge effect of the sensor electrode,by combing theoretical analysis with computer numerical simulation,the electric field of the tilting capacitance inclination sensor is discussed by using conformal transformation method,Green function method and software MATLAB,the distribution of the static electric field is obtained in the sensor,and the relationship between its capacitance and angular displacement is given.The variation curve between the capacitance of the sensor and its angular displacement is drawn,and the factors affecting the linearity and sensitivity of the sensor are analyzed.The numerical simulation results show that increasing the area of the sensor electrode,reducing the distance from the upper end of the electrode to the suspension point or fixed point,and moderately increasing the angle between the two fixed electrodes can improve its linearity and sensitivity,and optimize the output characteristics of the sensor.

Key words: Pendulous capacitive tilt sensor, Conformal transformation method, Green function method, Edge effect, Characteristics optimization, Numerical simulation