宇航计测技术 ›› 2025, Vol. 45 ›› Issue (1): 87-94.doi: 10.12060/j.issn.1000-7202.2025.01.15

• 精密测试技术 • 上一篇    下一篇

等离子体发射光谱法简化分析研究

李耀1，郑悦2，贾军伟1,*，徐亚迪3，王青青1，武宇婧1，常猛1，李绍飞1   

  1. 1.北京东方计量测试研究所，北京 100086；

    2.北京卫星环境工程研究所，北京 100094；

    3.合肥市计量测试中心，合肥 230088
  • 出版日期:2025-03-15 发布日期:2025-03-27
  • 作者简介:李耀（2000-），男，助理工程师，硕士，主要研究方向：航天器等离子体及光谱探针诊断技术。
  • 基金资助:
    国家自然科学基金项目（U22B2094）资助。

Simplified Analysis of Plasma Emission Spectroscopy

LI Yao1，ZHENG Yue2，JIA Junwei1,*，XU Yadi3，WANG Qingqing1，WU Yujing1，CHANG Meng1，LI Shaofei1   

  1. 1.Beijing Orient Institute of Measurement and Test，Beijing 100086，China;

    2.Beijing Institute of Spacecraft Environment Engineering，Beijing 100094，China;

    3.HeFei Center of Metrology and Testing，Hefei 230088，China

  • Online:2025-03-15 Published:2025-03-27

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摘要： 发射光谱法作为测量等离子体关键参数的一种重要非介入式测量手段，现有常规的发射光谱测量方法虽能获取部分电子温度、电子密度等关键参数的信息，但是传统的发射光谱模型实际上包含了很多个原子能级的碰撞辐射过程，研究者们主要根据截面近似计算方法或经验公式对碰撞辐射过程涉及到的参数进行分析，其分析模型较为复杂。针对上述问题，开展了等离子体发射光谱法的简化分析研究，旨在建立一种应用于氩的750 nm和751 nm特征波长谱线的更加精简的发射光谱日冕模型，并搭建一套基于电感耦合等离子体源的试验系统实现等离子体电子温度和电子密度的非介入式测量，通过试验验证模型，为发射光谱法测量等离子体关键参数的研究提供技术参考。

关键词: 发射光谱分析, 电子, 碰撞电离, 电感耦合等离子体

Abstract: Emission spectroscopy is an important non intrusive measurement method for measuring key parameters of plasma.Although conventional emission spectroscopy measurement methods can obtain information on key parameters such as electron temperature and electron density，traditional emission spectroscopy models actually include collision radiation processes of many atomic energy levels.Researchers mainly analyze the parameters involved in collision radiation processes based on cross-sectional approximation calculation methods or empirical formulas.The analysis model is relatively complex.In response to the above issues，this article conducted a simplified analysis of plasma emission spectroscopy，aiming to establish a more concise coronal model of emission spectra applied to the 750 nm and 751 nm characteristic wavelength spectral lines of Ar，and build an experimental system based on inductively coupled plasma source to achieve non intrusive measurement of plasma electron temperature and electron density.Through experimental verification of the model，it provides technical reference for the study of key parameters of plasma measured by emission spectroscopy.

Key words: Emission spectrum analysis, Electron, Impact ionization, Inductively coupled plasma

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