宇航计测技术 ›› 2017, Vol. 37 ›› Issue (2): 68-72.doi: 10.12060/j.issn.1000-7202.2017.02.14

• 论文 • 上一篇    下一篇

利用静电双探针对辉光放电等离子体诊断分析

葛萌1；张莉莉1；蔡惠华1；孙德冲1；贾丰锴1   

  1. 1、北京航天计量测试技术研究所,北京 100076
  • 出版日期:2017-04-25 发布日期:2017-04-25
  • 作者简介:葛萌（1988-），女，博士，主要研究方向：无线电物理技术。

Diagnosis of Glow Discharge Plasma by Langmuir Double Probe

GE Meng1；ZHANG Li-li1；CAI Hui-hua1；SUN De-chong1；JIA Feng-kai1   

  1. 1、Beijing Aerospace Institute for Metrology and Measurement Technology, Beijing 100076, China
  • Online:2017-04-25 Published:2017-04-25

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摘要： 阐述了利用Langmuir双探针诊断等离子体参数的基本原理，对圆柱腔中的空气辉光放电等离子体进行了双探针诊断，通过实验测得伏安特性曲线，计算得出等离子体密度和电子温度。分析了密度参数变化与放电电流大小之间的关系。最后将诊断结果与准光腔系统进行比较，二者虽略有差别，但差别不大，且变化趋势一致。验证了采用本双探针系统诊断辉光放电等离子体密度的可靠性。

关键词: Langmuir双探针, 辉光放电, 等离子体, 电子密度, 伏安特性, 曲线, 诊断

Abstract: The principle of plasma diagnosis by Langmuir double-probe is described, and the parameters of glow discharge plasma are measured. Electron temperature and electron density are calculated according to the double-probe I-V characteristic curve, and the variations of electron density are analyzed as a function of discharge current. The diagnosed results are compared with results obtained from quasi-optical cavity, and they show good agreement with each other. They have negligible difference and are in agreement of same variation. The reliability and correctness of using Langmuir double-probe to diagnose glow discharge plasma are verified.

Key words: Langmuir double-probe, Glow discharge, Plasma, Electron density, Volt-ampere characteristic, Curve, Diagnosis

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