宇航计测技术 ›› 2023, Vol. 43 ›› Issue (1): 30-33.doi: 10.12060/j.issn.1000-7202.2023.01.06

• 量值传递技术 • 上一篇    下一篇

自动和半自动探针台的载片台水平位移测量方法研究

霍晔1，吴爱华1，王一帮1，栾鹏1，刘晨1，梁法国1，杜静2   

  1. 1.中国电子科技集团公司第十三研究所，石家庄 050051；2.解放军陆军步兵学院石家庄校区，石家庄 050083
  • 出版日期:2023-02-25 发布日期:2023-04-12
  • 作者简介:霍晔（1989-），男，助理工程师，本科，主要研究方向：无线电计量测试技术。

Research on Measuring Method of Horizontal Displacement of the Chuck for Automatic and Semi-automatic Probe Platform

HUO Ye1,WU Ai-hua1,WANG Yi-bang1,LUAN Peng1,LIU Chen1,LIANG Fa-guo1,DU Jing2   

  1. 1.The 13th Research Institute of China Electronics Technology Group Corporation,Shijiazhuang 050051,China;
    2.Shijiazhuang Division of PLA Infantry Academy,Shijiazhuang 050083,China
  • Online:2023-02-25 Published:2023-04-12

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摘要： 为解决自动和半自动探针台的载片台水平方向位移发生偏差时，导致探针压点位置不准，从而使测试结果不可靠，甚至伤及芯片和探针的问题。根据实际工艺和溯源机构的标准器具特性，设计了标准尺的图形，在苏打玻璃上电镀5 μm宽的金线条，制作成152.4 mm×20 mm的长方形标准尺，其测量范围为（0~150）mm。对标准尺进行了定标，定标不确定度为1.0 μm。在测量范围内，进行了试验分析，评定了测量不确定度。结果表明：标准尺测量的水平位移偏差小于4 μm，满足测试需求。

关键词: 自动, 探针台, 位移, 标准尺, 不确定度

Abstract: In order to solve the problem that the pressure point of the probe is not accurate when the horizontal displacement of the chuck of the automatic and semi-automatic probe platform is deviated,which leads to the unreliable test results and even hurts the chip and probe.According to the actual process and the traceability mechanism of the standard instrument,the drawing of standard ruler was designed,electroplated 5 μm wide gold lines on soda glass,and made into 152.4 mm×20 mm rectangular standard ruler,its measurement range of （0~150）mm.The standard ruler was calibrated whit an uncertainty of 1 μm.In the measurement range,the experimental analysis is carried out and the measurement uncertainty is evaluated.The results show that the deviation of horizontal displacement measured by standard ruler is less than 4 μm,which meets the testing requirements.

Key words: Automatic, Probe platform, Displacement, Standard ruler, Uncertainty

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