宇航计测技术

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1MΩ~100GΩ高值电阻器高精度的校准方法

王一帮1；郑世棋1；梁法国1；乔玉娥1；刘霞美1   

  1. 1、中国电子科技集团公司第十三研究所，河北石家庄 050051
  • 出版日期:2015-10-15 发布日期:2015-10-15
  • 作者简介:王一帮（1987-），男，工程师，主要研究方向：电磁、无线电计量。

A High Accurate Calibration Method for High Value DC Resistor 1MΩ~100GΩ

WANG Yi-bang1；ZHENG Shi-qi1；LIANG Fa-guo1；QIAO Yu-e1；LIU Xia-mei1   

  1. 1、The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051
  • Online:2015-10-15 Published:2015-10-15

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摘要： 高阻计、数字源表等仪器在半导体行业有着广泛的应用。但目前市场上1MΩ~100GΩ高值电阻器准确度(±1.0×10-3~±1.0×10-2)无法满足高阻计、数字源表等仪器电阻参数的溯源需求。本文提出了一种高精度的高值电阻器的校准方法，该方法由两个多功能校准源和指零仪组成的比较电桥实现。根据校准方法组建了1MΩ~100GΩ测量系统，测量结果的不确定度为3.0×10-5~8.0×10-4，可满足市场上绝大部分高阻测量仪器的校准需求。

关键词: 高值电阻器, 校准方法, 高阻计, 比较电桥

Abstract: High resistance meter and digital source-meter have a wide application in semiconductor industry. But commercial high value resistance whose accuracy is (±1.0×10-3~±1.0×10-2) cannot meet the need of traceability of resistance parameter for high resistance meter and digital source-meter. The paper demonstrates a high accurate calibration method for commercial high value dc resistor, realized by a comparator bridge composed of two multifunctional calibrated voltage source and a zero-current-meter. A calibrated system is set based on the method, and the measurement uncertainty is 3.0×10-5~8.0×10-4, whose accuracy can meet the calibration need of most of high resistance measurement instrument.

Key words: High value resistor, Calibration method, High resistance meter, Comparator bridge

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