宇航计测技术 ›› 2015, Vol. 35 ›› Issue (4): 27-33.doi: 10.12060/j.issn.1000-7202.2015.04.07

• 论文 • 上一篇    下一篇

无介质硅压阻式压力/压差传感器的研制

王臻1；李文璋1；王彦奎1；朱廷伟1；刘书选1   

  1. 1、北京精密机电控制设备研究所，北京 100076
  • 出版日期:2015-08-15 发布日期:2015-08-15

Research of Silicon Piezoresistive Pressure/Differential Pressure Sensor Without Medium

WANG Zhen1；LI Wen-zhang1；WANG Yan-kui1；ZHU Ting-wei1；LIU Shu-xuan1   

  1. 1、Beijing Research Institute of Precise Mechanical and Electronic Control Equipment，Beijing 100076
  • Online:2015-08-15 Published:2015-08-15
  • About author:王臻（1983-），女，硕士，工程师，主要研究方向：电子测量技术。

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被引次数

6

摘要： 目前，硅压阻式压力/压差传感器在伺服系统上得到广泛的应用。但是由于其内部压力敏感芯体的封装结构为薄膜隔离式，其内部硅油的密封性是伺服系统配套传感器长期带压贮存的软肋。根据伺服系统对压力/压差传感器的需求，研制了几种无介质压阻式压力/压差传感器，其内部避免了硅油介质传递压力，保证了传感器的可靠性。通过传感器原理结构的研究，以及其性能指标的测试和对比，为伺服系统配套传感器提供了新的选择。

关键词: 无介质, 硅压阻式, 压力/压差传感器

Abstract: At present, silicon piezoresistive pressure/differential pressure sensor is widely used in servo system. But because the package structure of sensor internal pressure sensitive core is thin-film isolated, the tightness of silicone oil is the weakness of servo system with sensor for long-term pressure-bearing storage. According to the requirement of the servo system of pressure/differential pressure sensor, several piezoresistive pressure/differential pressure sensors without medium are developed, interior of sensor the silicone oil medium to transfer the pressure is avoid, and the reliability of sensor is ensured. Through research of sensor structure, and its performance test and contrast, a new choose for servo system with sensor is provided.

Key words: Without-medium, Silicon piezoresisitive, Pressure/Differential Pressure Sensor

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