无介质硅压阻式压力/压差传感器的研制

王臻；李文璋；王彦奎；朱廷伟；刘书选

Research of Silicon Piezoresistive Pressure/Differential Pressure Sensor Without Medium

WANG Zhen；LI Wen-zhang；WANG Yan-kui；ZHU Ting-wei；LIU Shu-xuan

宇航计测技术 . 2015, (4): 27 -33 . DOI: 10.12060/j.issn.1000-7202.2015.04.07