原子层沉积纳米钝化层薄膜厚度测量技术研究

李建国；惠龙飞；秦利军；龚婷；张王乐

Research on In-situ Thickness Measurement of Atomic Layer #br# Deposition Nano-Passivation Layers

LI Jian-guo；HUI Long-fei；QIN Li-jun；GONG Ting；ZHANG Wang-le

宇航计测技术 . 2019, (3): 1 -6 . DOI: 10.12060/j.issn.1000-7202.2019.03.01