关键词: 热流传感器, 光刻工艺, 薄膜, 离子束, 溅射

Abstract: At present, aiming at the problems of poor consistency and immature preparation of transient heat flux sensor in China, this paper puts forward a kind of photolithography process and the preparation method of the ion beam sputtering coating process, two hundred pairs of T-shaped metal thin film thermocouples are deposited at 10mm×10mm water-cooled block, measuring 1μm thermal resistance of the alumina temperature difference,finally the heat flux value is obtained.The new high-temperature transient heat flux sensor is calibrated by the comparison method. The consistency error of 0.211%, that is, the consistency of the process is about 99.79%. Experiments show that the novel high temperature transient heat flux sensor has very good consistency, the preparation process has good repeatability and portability, and can meet the needs of high temperature transient heat flux detection. In order to promote the application of heat flux sensors and standardize and mass produce,it provides a good technical support.

Key words: Heat flux sensor, Photolithography, Thin film〓Ion beam, Sputtering technology