宇航计测技术 ›› 2023, Vol. 43 ›› Issue (1): 1-5.doi: 10.12060/j.issn.1000-7202.2023.01.01

• 理论与前沿技术 •    下一篇

基于双光梳的激光吸收谱真空分压力测量技术研究

范栋1,2，李得天1,2,*，成永军1，代虎1，习振华1，贾文杰1   

  1. 1.兰州空间技术物理研究所真空技术与物理重点实验室，兰州 730000；
    2.东北大学机械工程与自动化学院，沈阳 110819
  • 出版日期:2023-02-25 发布日期:2023-04-12
  • 通讯作者: 李得天（1966-），男，中国工程院院士，研究员，博士，主要研究方向：真空计量测试技术。
  • 作者简介:范栋（1992-），男，博士在读，主要研究方向：量子真空计量技术。

Research on Vacuum Partial Pressure Measurement Technology based on Dual-comb with Laser Absorption Spectrum

FAN Dong1,2,LI De-tian1,2,*,CHENG Yong-jun1,DAI Hu1,XI Zhen-hua1,JIA Wen-jie1   

  1. 1.Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;2.School of Mechanical Engineering & Automation,Northeastern University,Shenyang 110819,China
  • Online:2023-02-25 Published:2023-04-12

PDF (PC)

132

摘要： 为了提高真空分压力测量的准确度和灵敏度，弥补传统测量方法的固有缺陷，真空分压力将结合理想气体定律，使用气体密度来表征。利用气体分子的红外吸收光谱，通过双光梳光谱技术测量其对特定波长光的吸收可实现对混合气体中目标气体密度的精确测量，进而反演出真空分压力。研建了基于电光双光梳的真空分压力测量系统，结合双光梳外差光谱技术与腔增强光谱技术，实现了非侵入、大动态、高速度的真空分压力测量。实验对CO2，CO，N2三元混合气体中CO2与CO的真空分压力进行了测量，其相对误差分别为2.84 %和2.77 %。通过不确定度分析得出，吸收线强度误差是真空分压力测量中最主要的不确定度分量。

关键词: 真空分压力, 电光双光梳, 吸收光谱

Abstract: To improve the accuracy and sensitivity of vacuum partial pressure measurement and make up for the inherent defects of traditional measurement methods,the vacuum partial pressure will be characterized by gas density in combination with the ideal gas law.By using the infrared absorption spectrum of gas molecules and measuring the absorption of specific wavelength light by dual-comb spectroscopy,the density of target gas in mixed gas can be accurately measured,and then the vacuum partial pressure can be inversely obtained.A vacuum partial pressure measurement system based on electro-optic dual-comb has been developed,combined with dual-comb heterodyne spectroscopy and cavity-enhanced spectroscopy,to achieve non-invasive,large dynamic,and high-speed vacuum partial pressure measurement.The vacuum partial pressure of CO2 and CO in the ternary mixture of CO2,CO and N2 was measured.The relative errors were 2.84 % and 2.77 % respectively.Through the uncertainty analysis,it is concluded that the absorption line strength error is the most important uncertainty component in the vacuum partial pressure measurement.

Key words: Vacuum partial pressure, Electro-optic dual-comb, Absorption spectrum

中图分类号: 

京ICP备09048426号-4　 京公网安备 11010602060144号　版权所有 © 《宇航计测技术》编辑部