氦质谱检漏技术的研究与实践

doi:10.12060/j.issn.1000-7202.2012.06.06

宇航计测技术

氦质谱检漏技术的研究与实践

濮荣强¹;黄文平²

1、芜湖信息技术职业学院电子信息系，芜湖 241000；
2、安徽皖仪科技股份有限公司，合肥 231088

出版日期:2012-12-15 发布日期:2012-12-15
作者简介:濮荣强（1962-），男，副教授，主要研究方向：通信信息系统。

Studied Practices of Helium Mass Spectrometer to Leaking Detection Technology

PU Rong-qiang¹;HUANG Wen-ping²

1、Wuhu Vocational College of Information Technology, Anhui Province, Wuhu 241000；
2、Anhui Wayee Science and Technology Co,Ltd,Anhui Province, Hefei 231088

Online:2012-12-15 Published:2012-12-15

摘要/Abstract

摘要： 在氦质谱检漏技术理论的基础上，采用了以微电脑为中心的自动控制技术，提高了氦质谱检漏仪的全自动操作智能化水平。180°非均匀磁场的实现，使离子聚焦更好。通过电子量程切换技术，减少了量程转换时间，扩大了测量范围，对高准确度密封性智能检测系统的实现进行了详细的研究与实践。

关键词: 真空测试, 氦质谱, 检漏

Abstract: Introducing the theoretical basis of helium mass spectrometer to leaking detection technology,the automatic control technology is used here , which improves intelligent level and reduces the range switching time and expands the measuring range with the helps of both 180° non-uniform magnetic field for ion focus and electronic range switching . The paper gives the studied practices to high precision sealed intelligent detection system in detail.

Key words: Vacuum test, Helium mass spectrometer, Leaking detection

濮荣强1;黄文平2. 氦质谱检漏技术的研究与实践[J]. 宇航计测技术, doi: 10.12060/j.issn.1000-7202.2012.06.06.

PU Rong-qiang1;HUANG Wen-ping2. Studied Practices of Helium Mass Spectrometer to Leaking Detection Technology[J]. JOURNAL OF ASTRONAUTIC METROLOGY AND MEASUREMENT, doi: 10.12060/j.issn.1000-7202.2012.06.06.

氦质谱检漏技术的研究与实践

Studied Practices of Helium Mass Spectrometer to Leaking Detection Technology

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