深微孔内径测量技术研究

doi:10.12060/j.issn.1000-7202.2012.04.02

宇航计测技术

深微孔内径测量技术研究

云鹏¹;周彩红¹;梁雅军¹;刘柯¹;王晓宁¹

1、北京航天计量测试技术研究所，北京　100076

出版日期:2012-08-15 发布日期:2012-08-15
作者简介:云鹏（1984-），女，硕士，主要研究方向：几何量计量技术的研究。

Researches on Measurement Technology of Micro-and-deep Aperture

YUN Peng¹;ZHOU Cai-hong¹;LIANG Ya-jun¹;LIU Ke¹;WANG Xiao-ning¹

1、Beijing Aerospace Institute for Metrology and Measurement Technology, Beijing 100076

Online:2012-08-15 Published:2012-08-15

摘要/Abstract

摘要： 介绍了一种基于高准确度电感传感器和红宝石测头，在测长机上实现深微孔径测量的方法，解决了内径的Φ1mm~Φ5mm、深度在40mm以下的深微孔内径的测量问题。通过对深微孔径测量装置测量不确定度的分析，在95%置信概率下，装置的测量不确定度为0.6μm，满足测量要求。

关键词: 深微孔径测量, 电感传感器, 红宝石测头

Abstract: The micro-and-deep aperture measurement method on length measuring machine using high accuracy inductance transducer and ruby probe is introduced. This method can measure the micro-and-deep aperture range from Φ1mm toΦ5mm and below 40mm height.When the confidence probability is 95%, the measurement uncertainty of this device is 0.6μm. The analysis result can meet these demands of measurement.

Key words: Measurement of micro-and-deep aperture, Inductance sensor, Ruby probe

云鹏;周彩红;梁雅军;刘柯;王晓宁. 深微孔内径测量技术研究[J]. 宇航计测技术, doi: 10.12060/j.issn.1000-7202.2012.04.02.

YUN Peng;ZHOU Cai-hong;LIANG Ya-jun;LIU Ke;WANG Xiao-ning. Researches on Measurement Technology of Micro-and-deep Aperture[J]. JOURNAL OF ASTRONAUTIC METROLOGY AND MEASUREMENT, doi: 10.12060/j.issn.1000-7202.2012.04.02.

深微孔内径测量技术研究

Researches on Measurement Technology of Micro-and-deep Aperture

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