Abstract: High resistance meter and digital source-meter have a wide application in semiconductor industry. But commercial high value resistance whose accuracy is (±1.0×10^-3~±1.0×10^-2) cannot meet the need of traceability of resistance parameter for high resistance meter and digital source-meter. The paper demonstrates a high accurate calibration method for commercial high value dc resistor, realized by a comparator bridge composed of two multifunctional calibrated voltage source and a zero-current-meter. A calibrated system is set based on the method, and the measurement uncertainty is 3.0×10^-5~8.0×10^-4, whose accuracy can meet the calibration need of most of high resistance measurement instrument.

Key words: High value resistor, Calibration method, High resistance meter, Comparator bridge