宇航计测技术 ›› 2012, Vol. 32 ›› Issue (3): 35-38.doi: 10.12060/j.issn.1000-7202.2012.03.09

• 论文 • 上一篇    下一篇

小电流测量单元校准技术研究

徐迎春1；莫玮1；刘冲2；于利红2   

  1. 1、广西桂林电子科技大学，桂林 540014；
    2、中国电子技术标准化研究院，北京 100007
  • 出版日期:2012-06-15 发布日期:2012-06-15

Research on Calibration of Low Current Measurement Unit

XU Ying-chun1；MO Wei1；LIU Chong2；YU Li-hong2   

  1. 1、Guilin University of Electronic Technology, Guilin 540014;
    2、China Electronics Standardization Institute, Beijing 100007
  • Online:2012-06-15 Published:2012-06-15

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摘要： 在电子、航空航天领域及型号工程中小电流测试设备（如静电计、皮安表、源/测量单元、半导体精密分析仪等），发挥着极其重要的作用，其电流测量分辨力达到fA级，接近其物理极限值。对这些高灵敏度、高分辨力的精密小电流测量仪器进行参数校准是一项新的计量难题。本文使用Fluke公司5440B型直流电压源和自行研制的高值电阻器，构成测试平台，可以对Keithley公司6517B型静电计（20pA～2μA电流量程）进行自动校准。软件采用Visual C++ 6.0利用校准算法对测量结果进行分析，解决了小电流测量单元校准的计量难题。

关键词: 小电流测量单元, 参数校准, 校准算法

Abstract: Low-current test instruments (such as the electrometer, Pico ammeters, source/measure units, semiconductor precision analyzers, etc.) play an extremely important role in the electronic and aerospace field and model engineering. The current measurement resolution level of fA grade touched its physical limit. It is a new metrology challenge that the precision low current measurement instruments of high sensitivity and strong resolution are calibrated. Fluke Instrument's 5440B and self-developed NIM-TΩ was used to constitute test platform in this article to calibrate Keithley Instrument's 6517B (current range: 20pA~2μA). Visual C + + 6.0 was used to develop calibrating software through analysis of measurement results. The metrology difficult problem of low current measurement unit calibration was solved.

Key words: Low Current measurement unit, Parameters calibration, Calibration algorithm

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