关键词: 高纯气体, 超痕量分析, 中红外, 量子测量

Abstract: This article reviews mid-infrared gas detection technology based on quantum precision measurements.With the development of the semiconductor industry,the requirements for the purity of electronic process gases continue to increase.Traditional mid-infrared gas detection technology faces sensitivity and accuracy challenges in trace gas detection.This article analyzes in detail the characteristics,application status and limitations of technologies such as fiber evanescent waves,photoacoustic spectroscopy,Fourier transform infrared spectroscopy,tunable diode laser absorption spectroscopy and optical cavity ring-down spectroscopy,and focuses on the introduction of quantum correlation spectroscopy.Mid-infrared gas detection technology breaks through the performance bottleneck of traditional mid-infrared detectors by utilizing photon quantum detectors and frequency up-conversion technology,significantly improving detection sensitivity and signal-to-noise ratio.This technology will become a key research direction in the future and This technological breakthrough provides an important reference for achieving higher-precision trace gas detection.

Key words: High-purity gas, Ultratrace analysis, Mid-infrared, Quantum measurement