Abstract: To ensure the diaphragm-based F-P hydrophone shares the sensitivity and resistance to net water pressure,a MEMS fiber F-P hydrophone is proposed,fabricated and tested.A silver membrane is fabricated using a sacrificial layer based membrane process as the sound pressure sensitive unit,and air is used as the material in the F-P cavity,thereby the sound pressure sensitivity of the fiber optic hydrophone is improved.The performance of MEMS fiber optic F-P hydrophone is tested and analyzed.The results show that the phase sensitivity of the fiber optic F-P hydrophone is -157±3 dB re 1rad/μPa in the range of 80～800 Hz,and the dynamic range at 400 Hz is 56.21 dB.This hydrophone has advantages such as simple structure and high sensitivity.

Key words: Silver Film, Fiber, Hydrophone, F-P