Optical Hybrid Sensor Based on EFPI-FBG Structure

doi:10.12060/j.issn.1000-7202.2023.02.10

Abstract

Abstract: An EFPI-FBG fiber hybrid sensor based on an extrinsic Fabry-Perot interferometer (EFPI) and a fiber Bragg grating (FBG) structure is studied to measure pressure and temperature simultaneously.Fused silica is used as the pressure-sensitive material，and femtosecond laser welding technology is used to package the sensor head.The working principle of the sensor is analyzed，fabricated and tested in detail.The results show that the sensitivity of the sensor in the range of 0.8 MPa is about -0.729 μm/MPa，and the temperature sensitivity in the range of 50℃~200℃ is 0.009 nm/℃.The marimum permissible error of the sensor is±4.12%FS.The investigated EFPI-FBG hybrid sensor is expected to be applied in fields requiring pressure-temperature dual-parameter measurement.

Key words: Fiber, Pressure, Temperature, Sensor

CLC Number:

TN253

LIU Dong-dong, WANG Wei, WANG Kun-peng, LIU Bin. Optical Hybrid Sensor Based on EFPI-FBG Structure[J]. Journal of Astronautic Metrology and Measurement, 2023, 43(2): 51-57.

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Optical Hybrid Sensor Based on EFPI-FBG Structure

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