Abstract: Chip-integrated metrology serves as an implementation method,possessing the advantages of high efficiency and low cost.The significant revolution of the International System of Units (SI) has freed metrological work from the trouble of physical benchmark and made the methods of reproducing values more flexible.Along with the development of quantum measurement methods,a number of chip-scale metrological standard device have been born.Micro-Electro-Mechanical System (MEMS),microfluidics,and chip-integrated laser are key supporting technologies for chip-integrated metrology.Based on quantum measurement technology,the realization of some fundamental units in the SI,like time,length,temperature,and current,has already taken the shape of chipization.Overall,chip-integrated metrology is still in its infancy,mainly in the form of chip-based sensing elements.In the future,continuous efforts should be made to develop chip-integrated metrological standards instruments and gradually construct a chip-integrated traceability chain to fulfill chip-integrated metrology.

Key words: Metrology, Micro-Electro-Mechanical System (MEMS), Microfluidics, International System of Units(SI), Quantum metrology, Semiconductor laser, Optical fiber laser