Abstract: For on-wafer power calibration, using a vector method to correct mismatch error introduced by microwave probe and power meter was proposed, and showed related formula. Then a method of extracting S parameters of a microwave probe was introduced, and compared the result with factory measurement data of the probe. Finally, the power measurement result using vector correction was compared with that of using scalar correction, showing that the at the frequency up to 40GHz, the accuracy of measurement result with vector correction is 0.4dB higher than without correction, and 0.1dB higher than scalar correction.

Key words: On-wafer power measurement , On-wafer , S parameters, Mismatch error, Vector correction