Journal of Astronautic Metrology and Measurement ›› 2025, Vol. 45 ›› Issue (1): 7-12.doi: 10.12060/j.issn.1000-7202.2025.01.02

Previous Articles     Next Articles

Michelson Lasers for Ultra-high Resolution Displacement Measurement

QIN Xiaomin1,LIU Zijie1,WANG Zhiyang1,SHI Hangbo1,LU Ziqi1,SHI Tiantian2,CHEN Jingbiao1,3,*   

  1. 1.State Key Laboratory of Advanced Optical Communication Systems and Networks,Institute of Quantum Electronics,School of Electronics,Peking University,Beijing 100871,China;

    2.National Key Laboratory of Advanced Micro and Nano Manufacture Technology,School of Integrated Circuits,Peking University,Beijing 100871,China;

    3.Hefei National Laboratory,Hefei 230088,China
  • Online:2025-03-15 Published:2025-03-27

Abstract: High-resolution displacement measurement is crucial in lithography,precision machining,biomedical detection,and other fields.In this paper,we propose a novel displacement measurement scheme based on Michelson lasers.Different from the traditional laser interferometers using electronic subdivision interference fringe method,Michelson lasers trace displacement measurement to laser frequency measurement with high resolution.Furthermore,we present and demonstrate a Faraday-Michelson laser utilizing the narrowband Faraday anomalous dispersion atomic filter as the frequency selection device,enabling simultaneous oscillation output of two laser modes,and preliminarily test the displacement measurement resolution of the system.As frequency measurement has a resolution well over 12 digits,our scheme can theoretically reach a displacement measurement resolution in pm or even finer,paving the way for future advancements in high-resolution displacement measurement.

Key words: High resolution, Geometric measurement, Beat frequency, Laser, Laser interferometer

CLC Number: