Abstract: Torque is one of the most important parameters of the micromagnetic devices of inertial navigation system,which is usually from the milli-Nm to 10^-6 Nm.In order to measure 10^-6 Nm torque value of micromagnetic devices,this paper researches a standard torque device,which has a torque calibration and measurement range reaching to 10^-6 Nm.The device adopts the new torque calibration and measurement technology based on the flexure suspension and zero-stiffness theory,designs the ultra-thin,one-piece flexure suspension protection structure,realizes the zero-stiffness suspension structure of the device,and solves the multi-degrees-of-freedom torsional deformation problem of the flexure suspension,so make the micro-torque measurement range expand to 10^-6Nm consequently.Simultaneously,this paper realizes the small torque automatic loading technology,puts forward the idea of automatic loading of milligram (mg) level weights step by step,solves the automatic loading problem of heterogeneous weights,eliminates the impact influence generated by manual loading of traditional small-torque devices,realizes the device's full-range automatic calibration and measurement,and enhances the quantity transmission reliability.Experiments shown that the device has a measurement range from 10^-6 Nm to 10^-4 Nm,and a relative measurement uncertainty better than 1% (k=2).

Key words: Electromagnetic device, Torque, Flexure suspension, Autoloading