Abstract: Quantum vacuum measurement is an important development direction of vacuum measurement technology in the future.Based on intrinsic physical properties of matter,quantum vacuum measurement has the characteristics of no calibration,little disturbance to vacuum environment and high precision.Currently,laboratory-scale cold atom quantum vacuum measuring devices have shown excellent performance,and scientists are working hard to advance the practical application of quantum sensors,which means that cold atom quantum vacuum measuring devices must be transformed from large laboratory-scale platforms to compact miniaturization quantum sensors.This requires miniaturization quantum sensors to have both a small size and excellent performance under extreme dynamic conditions.The latest advances in cold atom quantum sensor miniaturization is presented,focusing on the key components required for atomic cooling,including laser systems,atomic sources,magneto-optical traps,and coils.The miniaturization scheme of each element and its influence on the sensor performance is discussed,and the development of cold atom quantum vacuum sensor is prospected.

Key words: Cold atom, Vacuum measurement, Miniaturization, Photonic integrated circuit, Grating magneto-optical trap