Journal of Astronautic Metrology and Measurement ›› 2022, Vol. 42 ›› Issue (6): 13-21.doi: 10.12060/j.issn.1000-7202.2022.06.03
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RAO Zhang-fei,QIN Kai-liang,XUE Dong,JIN Hong-xia
Online:
Published:
Abstract: In terms of the pulse test and calibration requirements of the third-generation wide-bandgap (WBG) semiconductor devices.Based on the research of double pulse test (DPT) method and principle of wide-bandgap semiconductor devices,The wide-bandgap semiconductor device test equipment technology status at domestic and foreign are analyzed.The precision calibration problem of 3 kV/50 μs pluse voltage are presented.The pulse high voltage calibration status and calibration method are researched.Through the mechanism analysis design and simulation of the resistive voltage divider,a precision voltage divider withstand voltage of 3 kV,rise time of 140 ns and amplitude linearity of 0.03% is developed.The self-developed pulse voltage divider is used to calibrate the pulse voltage of the semiconductor discrete device test equipment.The uncertainty of the calibration result is 0.5%,the needs of pulse high voltage calibration are satisfied.
Key words: Wide-bandgap semiconductor, Test equipment, Double pulse test, Pulse voltage calibration
CLC Number:
TM835.1
RAO Zhang-fei, QIN Kai-liang, XUE Dong, JIN Hong-xia. Research on Pulse Voltage Testing and Calibration of Wide-bandgap Semiconductor Devices[J]. Journal of Astronautic Metrology and Measurement, 2022, 42(6): 13-21.
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URL: http://www.yhjcjs.com.cn/EN/10.12060/j.issn.1000-7202.2022.06.03
http://www.yhjcjs.com.cn/EN/Y2022/V42/I6/13