Abstract: Recent development of generation and measurement technique of terahertz pulses have been reviewed in this paper. Detailed instructions also show for generation and measurement technique of terahertz pulses as well as their merits and drawbacks. And the application of terahertz pulses technology in metrology have been given, such as wide bandwitdh osscilloscope, ultrafast photodetector, ultrafast pulse generator, wide bandwidth comb generator and so on.

Key words: Terahertz pulse, Terahertz generation, Terahertz measurement, ⁺Terahertz metrology