Abstract: Vacuum tested system of locale testing ranges from 10⁵Pa to 2×10^-9Pa. In this article, the hardware composing and working principle is introduced. The system is made up of capacitance diaphragm gauges, reference gauges, extractor gauges and flange fittings. Based on the Labview software, to meet the demand of ordinary type service, an vacuum tested system of locale program is developed. This software can be applied to the testing of kinds of vacuum equipment, provides modular structures which may automatically deal with the date of tested machines, and the original record and certificates can go into mass production automatically.

Key words: Vacuum system, Labview, Capacitance diaphragm gauges, Reference gauges, Extractor gauge, Flange