Research of Silicon Piezoresistive Pressure/Differential Pressure Sensor Without Medium
WANG Zhen;LI Wen-zhang;WANG Yan-kui;ZHU Ting-wei;LIU Shu-xuan
JOURNAL OF ASTRONAUTIC METROLOGY AND MEASUREMENT . 2015, (4): 27 -33 .  DOI: 10.12060/j.issn.1000-7202.2015.04.07