Journal of Astronautic Metrology and Measurement ›› 2025, Vol. 45 ›› Issue (1): 87-94.doi: 10.12060/j.issn.1000-7202.2025.01.15

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Simplified Analysis of Plasma Emission Spectroscopy

LI Yao1,ZHENG Yue2,JIA Junwei1,*,XU Yadi3,WANG Qingqing1,WU Yujing1,CHANG Meng1,LI Shaofei1   

  1. 1.Beijing Orient Institute of Measurement and Test,Beijing 100086,China;

    2.Beijing Institute of Spacecraft Environment Engineering,Beijing 100094,China;

    3.HeFei Center of Metrology and Testing,Hefei 230088,China

  • Online:2025-03-15 Published:2025-03-27

Abstract: Emission spectroscopy is an important non intrusive measurement method for measuring key parameters of plasma.Although conventional emission spectroscopy measurement methods can obtain information on key parameters such as electron temperature and electron density,traditional emission spectroscopy models actually include collision radiation processes of many atomic energy levels.Researchers mainly analyze the parameters involved in collision radiation processes based on cross-sectional approximation calculation methods or empirical formulas.The analysis model is relatively complex.In response to the above issues,this article conducted a simplified analysis of plasma emission spectroscopy,aiming to establish a more concise coronal model of emission spectra applied to the 750 nm and 751 nm characteristic wavelength spectral lines of Ar,and build an experimental system based on inductively coupled plasma source to achieve non intrusive measurement of plasma electron temperature and electron density.Through experimental verification of the model,it provides technical reference for the study of key parameters of plasma measured by emission spectroscopy.

Key words: Emission spectrum analysis, Electron, Impact ionization, Inductively coupled plasma

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