关键词: 量热式功率计, 掺杂硅片, 波导负载

Abstract: Power is one of the most basic parameters of microwave and millimeter wave measurement,and its measurement results have important reference value for research and applications in radar,communication,remote sensing and other fields.For the calorimetric power metering standards in the frequency bands of (50~75) GHz,(75~110) GHz,(110~170) GHz, etc.Traditional absorbing loads can use wedge-shaped absorbing loads embedded with micro surface mount resistors as microwave DC power replacement devices.There are two problems with this kind of load:first,it is difficult to process,and it is difficult to continue to expand the frequency band upward;second,because the traditional millimeter-wave absorbing materials show non-magnetic characteristics in the frequency band above 70 GHz,the absorbing ability is remarkable decline.Based on the above background,this paper has carried out the research on the waveguide load in the form of straight waveguide from 75 GHz to 325 GHz, including the research and development of the ultra-wideband matching load in the form of multi-layer bulk doped bonded silicon wafers.The combination of multi-layer bulk doped silicon wafers achieves broadband and low reflection characteristics.The typical value of the measured standing wave of the absorbing load in the three frequency bands of (75~110) GHz, (140~220) GHz and (220~325) GHz is below 1.12.

Key words: Calorimetric power meter, Doped silicon wafer, Waveguide load