关键词: 晶圆级标准, CD-SEM校准, 不确定度, 符合性评价

Abstract:

In terms of satisfying the calibration requirement of CD-SEM, we present several ways to reduce the effect of the CD-SEM and standard quality attribute on the measurement based on the research of calibration principle and method. We get the maximum times of a standard at the same location at the same time when used for the calibration. Then a calibrating process and uncertainty evaluation of Hitachi S9830 CD-SEM has been made by using the 100nm nanolattice wafer standard, and a conformance evaluation whether the CD-SEM satisfy the expected requirement has been made based on the calibration result. It shows that the indicating error of S9830  CD-SEM is less than the combined uncertainty when used for critical dimension measure, adjusting  the CD-SEM is not needed.