宇航计测技术 ›› 2021, Vol. 41 ›› Issue (2): 43-48.doi: 10.12060/j.issn.1000-7202.2021.02.08

• 精密测试技术 • 上一篇    下一篇

热反射测温系统测温准确度验证方法研究

丁晨， 翟玉卫 ，刘岩 ，郑世棋， 吴爱华   

  1. 中国电子科技集团公司第十三研究所，石家庄 050051；
  • 出版日期:2021-04-01 发布日期:2022-02-21
  • 作者简介:丁晨（1991-），男，工程师，主要研究方向：电学计量技术及半导体器件红外测试。

Research On Verification Method For Temperature Measurement Accuracy of Thermal Reflection Temperature Measurement System

DING Chen， ZHAI Yuwei ， LIU Yan ， ZHENG Shiqi， WU Aihua   

  1. The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang 050051，China
  • Online:2021-04-01 Published:2022-02-21

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摘要： 针对热反射测温系统测温准确度验证结果不准确的问题，提出了一种热反射测温系统测温准确度的验证方法。采用以Si为衬底，利用半导体工艺制备金薄膜电阻，通过制作夹具，键合薄膜电阻与夹具的方式研制出验证电阻件。使用温控平台在30～100℃温度下对其进行温度系数考核，结果表明电阻件的阻值与温度有良好的线性关系。通过热电法计算出电阻件温度值，与热反射测温系统测量的电阻件温度值相比较，从而实现热反射测温系统测温准确度验证，保障了热反射测温系统的测温准确性。

关键词: 热反射测温, 温度监测, 准确度

Abstract: A verification method was provided to solve the problem that the verification result of the temperature measurement accuracy of the thermal reflection temperature measurement system was not accurate. The Verification of resistance standard was fabricated by semiconductor process, which build thin-film resistor on Si substrate. The thin-film resistor was made by Au. The Verification standard was developed by making fixture and bonding the thin-film resistor to the fixture. The temperature coefficient of the resistor was tested by the temperature control platform at the temperature of 30 ~ 100 ℃. The results show good linearity relationship between resistance and temperature. Compared the temperature of the standard by the thermal reflection temperature measurement system with the temperature of the standard was calculated by thermo-electric method .In this way, the temperature measurement accuracy of the thermal reflection temperature measurement system was verified, and ensure the accuracy of temperature measurement.

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