关键词: 表面轮廓, 空间频率, 光学检测, 光干涉计量

Abstract: China’s advanced manufacturing industry is developing rapidly.Among them,the optical component manufacturing is becoming larger(the diameter of monomer is several meters) or smaller(the scale is in the micro nano level),which brings new challenges to the non-contact optical detection technology.Taking the detection technology and instrument of optical surface wide spectrum profile as an example,this paper analyzes the development overview and trend at home and abroad,and shows independent research and development of series of optical interference detection instrument in China,which have scientific significance for solving the problem of neck sticking.

Key words: Surface profile, Spatial frequency, Optical metrology, Interferometry