关键词: 在片, 十六项误差模型, 校准标准, 散射参数

Abstract: On-wafer-level 16-term error model calibration standards used for characterization of W-band circuits based on grounded coplanar waveguide (GCPW). These transistors were fabricated on thin gallium arsenide (GaAs) substrate with metal ground on the back, and via holes were utilized to ensure single mode propagation (i.e., eliminating the parallel-plate mode or surface mode). For accurate definition of the calibration standards, multiline thru-reflect-line (TRL) assistant standards were also fabricated on the same wafer and measured. Passive device was measured subject to both 16-term and commercial LRRM calibrations. Measurement results demonstrate that 16-term calibration standards are capable of determining the cross-talk more accurately. This cluster of work reveals that the proposed GCPW GaAs calibration substrate could be a feasible alternative to conventional CPW impedance standard substrates, for on-wafer measurements at W-band and above.

Key words: On wafer；16-term error model； , Calibration standards ；Scattering parameters